Academics / Courses / DescriptionsMAT_SCI 398: Introduction to Plasma Science and Processing Technology
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Description
Plasma production, properties, transport and characterization. Plasma processing of thin films, powders, and advanced materials.
Textbook: None required. The following books will be optional and they will be on reserve at the library. Lieberman & Lichtenber, Principles of Plasma Discharges and Materials Processing, John Wiley & Sons, 2005. Vossen & Kern, Thin Film Processes II, Academic Press, Inc., 1991, 866 pages. Nicholson, Dwight R., Introduction to Plasma Theory, John Wiley & Sons, 1983, 292 pages.