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MECH_ENG 451: Micromachining

Prerequisites

None

Description

gear Fundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps.

Who Takes It

Tech or other science major graduate students who plan their research based on micro/nano systems approaches. Those who want to gain broad knowledge about the new micro/nano technology trends.

What It's About

Micro Electro Mechanical Systems (MEMS) has demonstrated powerful capabilities in many fields of engineering and science. MEMS-based commercial products are already in the market, replacing existing technology, or creating new possibilities. This technology is firmly based on a unique manufacturing paradigm, micromachining. Micromachining is a core technology that enables the MEMS and related new approaches in engineering and science. This course will cover the fundamental fabrication and theoretical issues of the micromachining critical in micro/nano systems applications.

Introduction:
- CMOS Process
- Micro-Electro-Mechanical-Systems(MEMS)
- Microsciences
Theory:
- Lithography
- Doping, Ion implantation
- Silicon oxidation
- Crystallography
- Etching
Microfabrication:
- Bulk micromachining
- Surface micromachining
- Soft micromachining
New trends:
- Nanotechnology integration
- Biotechnology integration
- Optical MEMS
Example applications:
- Microsensors
- Microfluidics
- On-chip DNA analysis
- Analyses of existing MEMS.
Hands on demonstration:
- Cleanroom tour
- Lithography
- Wet & dry etching
- Sample inspection

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